| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for obtaining a microscopic image clearly showing the original shape of a sample surface on the surface of the sample in a process of cross-sectional machining, for observation technologies for processing of and observing of a cross section to be observed using a focus ion beam apparatus. SOLUTION: A coating layer of a maternal different from that of the unprocessed surface of a sample is first formed on the surface of the sample, and deposition is then performed to form a protective layer. In addition, the part is then processed for cross section. This causes the coat layer of a different material which is interposed on the boundary between the original surface of the sample, and the part on which a protective layer is deposited and accumulated by means of deposition. In a microscope image, the existence of the coat layer of the different material can clearly show the original shape of the covering surface of the sample.</p> |
