| 摘要 |
PROBLEM TO BE SOLVED: To improve the throughput and the working rate of a peripheral aligner. SOLUTION: A light source unit 14A and a light source unit 14B are respectively movable in±X directions along a support member 12A and a support member 12B. The support members 12A and 12B are made to travel in±Y directions, while emitting light beams from both light source units 14A and 14B, so that the photoresist of the peripheral part of a glass substrate G is exposed. In the state where either the light source units 14A or 14B is turned off, peripheral exposure operation is continued by the other light source unit. This, the continuation of the peripheral exposure operation by only the other light source unit is attained during the cool-down and the warm-up periods of a lamp needed at exchanging of the lamp of the other light source unit. Also, at exposing of an exposure object area along one line, both light source units 14A and 14B are moved in tandem along one line.
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