| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a film thickness control method for completely forming and removing coating with an optimum film thickness that is formed by using vapor obtained by evaporating stock solution. SOLUTION: The average film thickness of coating is measured over a wide range by a feeler-type film thickness measuring instrument or the like, and at the same time the amount of main constituent of coating is analyzed, for example, by a time-of-flight secondary ion mass spectrograph, thus grasping and controlling the accurate amount of main constituent of coating.</p> |
