| 摘要 |
PROBLEM TO BE SOLVED: To improve the throughput of continuous working at a low cost. SOLUTION: Each of processing A1 to A3 measures the shape of a target, executes data processing and works a work in each processing. At the end of processing occupation time Ti of the processing A1, the working of the work is started and the measurement processing, data processing, etc., (processing A2) of a succeeding target are started. Consequently the processing occupation time Ti of the processing A2 is advanced in parallel with the working occupation time To of the processing A1. Since the working occupation time Ti of the processing A1 has been ended before the end of the processing occupation time Ti of the processing A2, the working of the work in the processing A2 can be instantaneously started by using the same working machine as that used for working the work in the processing A1 and the throughput can be improved.
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