发明名称 CAPACITANCE TYPE DISPLACEMENT DETECTOR
摘要 PROBLEM TO BE SOLVED: To detect displacement even in the case of a short circuit or damage in a part of a receiving electrode in a capacitance type displacement detector. SOLUTION: A scale 10 is provided with a transmitting electrode 10a and a detecting electrode 10b, and an opposite scale is provided with a receiving electrode 12. A change in capacitance due to a displacement between the scales is detected by the detecting electrode 10b. The receiving electrode 12 is provided with a slit 13 orthogonal to the length measuring direction, and the receiving electrode is insulated and divided into parts 12a, 12b, 12c by the slit 13. Even in the case of short circuit or damage in the receiving electrode 12a, no influence is exerted on the receiving electrodes 12b, 12c so as to detect displacement.
申请公布号 JP2001201307(A) 申请公布日期 2001.07.27
申请号 JP20000010457 申请日期 2000.01.19
申请人 MITSUTOYO CORP 发明人 ADACHI SATOSHI;NAKAYAMA KENICHI;TAKAHASHI TETSUTO;HASEGAWA TOSHIHIRO
分类号 G01B7/00;G01D5/24;G01D5/244;G01D5/245;(IPC1-7):G01B7/00 主分类号 G01B7/00
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