METHOD OF PRODUCING DIFFRACTION ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of producing a diffraction device by which a specified three-dimensional diffraction grating can be formed even in a material having a high melting point (softening point) such as quartz in a short time. SOLUTION: A diffraction device having a specified three-dimensional diffraction grating formed in the object is produced by irradiating the object with energy beams through a stencil mask having a specified form (pattern) to etch.