发明名称 TOOL POSITION DETECTOR, DETECTION DEVICE AND METHOD, AND OFFSET MEASUREMENT METHOD
摘要 PROBLEM TO BE SOLVED: To detect the position of a tool accurately. SOLUTION: When the tip of a tool 4 is lowered, the tip shoulder of the tool 4 is brought into contact with either position of a guide slope 32, and further a position detector 30 travels in the horizontal direction along a tape 13 by the interference between the tool 4 and the guiding slope 32. When the lowering is completed, the axis center of the tool 4 is aligned with an axis center 32a of the guide slope 32. The image of a position after the move is picked up by a camera for detecting positions and image processing is made, thus detecting the position of the tool 4.
申请公布号 JP2001203233(A) 申请公布日期 2001.07.27
申请号 JP20000012750 申请日期 2000.01.21
申请人 SHINKAWA LTD 发明人 KATO MOTOHIKO
分类号 H01L21/60 主分类号 H01L21/60
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