| 摘要 |
PROBLEM TO BE SOLVED: To realize a reduced-pressure annealing device as well as perform both reduced-pressure hydrogen annealing and atmospheric pressure hydrogen annealing in the same hydrogen annealing device. SOLUTION: This hydrogen annealing device is provided with a reaction chamber 2, a hydrogen gas introduction line 18 for introducing a hydrogen gas into the reaction chamber, and an atmospheric pressure exhaust line 9 and a reduced-pressure exhaust line 5 which are connected with the reaction chamber. The exhaust lines are changed over to select the reduced-pressure hydrogen annealing or atmospheric pressure hydrogen annealing, and a necessary treatment method is selected in accordance with an object to be treated such as a device necessary for being reduced, a device necessary for removal of impurities, etc., thus improving the quality of products.
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