| 摘要 |
<p>An electrostatic chuck member having a high adsorption force and superior in response performance (release property) when application of voltage is stopped, comprising an undercoat in the form of a metallic layer on at least one surface of a base member, a lower insulation layer of Al2O3 ceramics on the undercoat, a metallic electrode layer on the insulation layer, an upper insulation layer, which is a topcoat, of Al2O3 ceramics on the electrode layer.</p> |
