ISOLATION TECHNIQUE FOR PRESSURE SENSING STRUCTURE

摘要

An electronic pressure-sensing device (6) is isolated from corrosive, conductive gasses and fluids by a corrosion resistant metal diaphragm (101b) welded to a pressure port (19). The pressure-sensing device (6) is attached to a support structure (14) with a hole (18) that provides a path from the diaphragm area (101b) to the pressure-sensing device (6). A fill fluid is sealed behind the diaphragm (101b) and fills the hole through the support structure (14) to the electronic pressure-sensing device (6). In this design, any hostile chemical applied is completely isolated from the electronic sensor and associated adhesive seals (15) by the metal diaphragm (101b).