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发明名称
Verfahren zur Herstellung einer Struktur mit einer mittels Anschlägen auf Abstand von einem Substrat gehaltenen Nutzschicht, sowie Verfahren zur Loslösung einer solchen Schicht
摘要
申请公布号
DE69613437(D1)
申请公布日期
2001.07.26
申请号
DE1996613437
申请日期
1996.07.19
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE, PARIS
发明人
BONO, HUBERT;MICHEL, FRANCE;REY, PATRICE
分类号
H01L21/302;B81B3/00;G01P15/08;H01L21/3065;H01L49/00;(IPC1-7):G01P15/08
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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