| 摘要 |
From one end of the apparatus, a gas supply tube (13) comprising electrically-conductive material, extends inside, as the inner conductor of a coaxial waveguide (1). A microwave coupler (10) is located at the second, opposite end. An additional, electrically-conductive hollow cylinder forming a waveguide insert (12) is introduced into the coaxial waveguide, surrounding the gas supply pipe coaxially, with clearance. Preferred Features: At the second end of the coaxial waveguide (1), a cylindrical waveguide (9) is connected; its other end carries the microwave coupler (10). Near the center, the cylindrical waveguide is fitted with a quartz window (14) extending transversely with respect to the longitudinal axis. The waveguide insert (12) includes recesses. It is uniformly and longitudinally slotted. In an alternative arrangement, the insert carries a series of circumferential rings, in another, the configuration is both slotted and ringed, with interruptions.
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