| 摘要 |
The invention provides a laser machining apparatus which can effectively machine a fine portion. Accordingly, in a laser machining apparatus which irradiates laser beams (11) onto a subject to be machined (37) so as to perform a machining, there are provided an injection locking type ultraviolet rays laser apparatus (1) having an unstable resonator (45, 46), a condenser array (29) having a plurality of condensers (28) arranged one to one in correspondence to an arrangement of machining positions (98) of the subject to be machined (37), and an intensity distribution converting optical part (25) for converting an intensity distribution of the laser beams (11). |
