Calibration method for galvanometer scanner control for laser machining device uses image processing device for evaluation of image provided by scanner to provide position correction table

摘要

The calibration method has the laser beam deflected along a calibration path (C) at the end of which it is de-focused and directed onto the working region (4) of the machining laser beam, for uniform illumination of this region, with detection of an image of the illuminated region via the galvanometer scanner (2) and evaluation via an image processing device (8). The difference between the actual and required positions are entered in a correction table used for providing corrected position values for the scanner during machining. An Independent claim for a calibration device for a galvanometer scanner control for a laser machining device is also included.