发明名称 ELECTRON BEAM EVAPORATION OF TRANSPARENT INDIUM TIN OXIDE
摘要 <p>A process for depositing a transparent coating of indium tin oxide on a substrate comprising providing said substrate in a partial vacuum environment and conducting electron beam evaporation of tin oxide doped indium oxide granules while operating an ion source providing oxygen adjacent said substrate until a coating of indium tin oxide is deposited on at least a portion of said substrate.</p>
申请公布号 WO2001053558(A2) 申请公布日期 2001.07.26
申请号 US2000035147 申请日期 2000.12.22
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