Piezoelectric/elecrostrictive actuator and method for fabricating the same

摘要

A piezoelectric/electrostrictive actuator and a method for fabricating the actuator are disclosed. The piezoelectric/electrostrictive actuator includes a vibrating plate made of metal, ceramic or resin. The actuator also optionally include a lower electrode formed on the vibrating plate. The actuator further includes a piezoelectric/electrostrictive thin or thick film formed on the vibrating plate or lower electrode by use of ceramic paste. The ceramic paste is produced by preparing ceramic oxide powder having a grain size of 5 mum or less and containing lead (Pb) and titanium (Ti) as basic elements thereof, said ceramic oxide powder being produced by a non-explosive oxidative-reductive combustion reaction carried out at a temperature of 100 to 500° C., preparing an organic solvent or water-based ceramic sol solution containing constituent ceramic elements identical or similar to those of said ceramic oxide powder, and mixing said ceramic oxide powder with said ceramic sol solution. An upper electrode is formed on the piezoelectric/electrostrictive film. The fabrication of piezoelectric elements is achieved at a considerably low temperature.