| 发明名称 |
GEOMETRIC AERIAL IMAGE SIMULATION |
| 摘要 |
An aerial image produced by a mask having transmissive portions is simulated by dividing the transmissive portions of the mask into primitive elements (94), obtaining a response for each of the primitive elements (96), and then simulating the aerial image by combining the responses over all of the primitive elements (98).
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| 申请公布号 |
WO0154046(A1) |
申请公布日期 |
2001.07.26 |
| 申请号 |
WO2000US01525 |
申请日期 |
2000.01.20 |
| 申请人 |
LSI LOGIC CORPORATION |
发明人 |
ALESHIN, STANISLAV, V.;EGOROV, EVGENIJ;BELOKOPITOV, GENADIJ;PETRANOVIC, DUSAN |
| 分类号 |
G03F1/08;G03F7/20;H01L21/027;(IPC1-7):G06G7/48;G06G7/58 |
主分类号 |
G03F1/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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