发明名称 Method for fabricating contact electrode of the semiconductor device
摘要 According to the present invention, a contact hole is formed by using a contact formation mask until portions of a first and a second impurity areas are respectively exposed, so that contact holes are formed. The size of the contact hole formed over the first impurity area (P-type impurity) is relatively larger than that of the contact hole formed over the second impurity area (N-type impurity). As a result, the size of the contact hole formed over an N-type impurity area decreases and that of the contact hole formed over a P-type impurity area increase to a corresponding degree, thereby reducing contact resistance generated on the P-type impurity area without increasing a chip size.
申请公布号 US2001009806(A1) 申请公布日期 2001.07.26
申请号 US20010799521 申请日期 2001.03.07
申请人 JANG SOON-KYOU 发明人 JANG SOON-KYOU
分类号 H01L21/768;H01L21/8242;H01L23/485;(IPC1-7):H01L21/476 主分类号 H01L21/768
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