发明名称 High speed and low parasitic capacitance semiconductor device and method for fabricating the same
摘要 A semiconductor device including a bipolar transistor formed by epitaxial growth or ion implantation is provided has an epitaxial silicon collector layer, a base region directly under an emitter defined as an intrinsic base and a peripheral region thereof defined as an outer base region is formed by the step of implanting ions into the collector layer to form a high concentration collector region at a location close to a buried region using a photoresist to form an aperture, and the step of implanting ions into the collector layer to form a high concentration collector region directly beneath the base region after forming the base region.
申请公布号 US2001009793(A1) 申请公布日期 2001.07.26
申请号 US20010791800 申请日期 2001.02.26
申请人 NEC CORPORATION 发明人 SATO FUMIHIKO
分类号 H01L29/73;H01L21/331;H01L29/08;H01L29/165;H01L29/732;H01L29/737;(IPC1-7):H01L21/331 主分类号 H01L29/73
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