发明名称 |
METHOD AND ARRANGEMENT FOR OPTICALLY DETECTING THE POSITION OF A MOVEABLE MIRROR |
摘要 |
The invention relates to a method for optically detecting the position of a moveable test object (10), especially a mirror or reflector. A measuring bea m (6) that is produced by means of a light source (2) is reflected by the test object (10) and reaches a position-sensitive light detector (12) which carri es out a conversion into information corresponding to the position of the test object (10). The aim of the invention is to improve said method in such a wa y that the position of mirrors, especially rotating mirrors, can be quickly an d optically measured, whereby the optical construction is simple. The measurin g beam (6) is focussed onto the light detector (12) by means of an optical system (8). A signal matching the centre of gravity or the maximum (Is) of t he intensity distribution of the focussed measuring spot is determined on the basis of the measured values obtained by means of the light detector (12).</ SDOAB>
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申请公布号 |
CA2398540(A1) |
申请公布日期 |
2001.07.26 |
申请号 |
CA20012398540 |
申请日期 |
2001.01.18 |
申请人 |
HEIDELBERG INSTRUMENTS MIKROTECHNIK GMBH |
发明人 |
KAPLAN, ROLAND;VOGLER, SVEN;WEIKERT, ROBERT;WIJNAENDTS-VAN-RESANDT, ROELOF |
分类号 |
G01B11/00;G01D5/26;G01D5/28;G01D5/30;G01M11/00;G02B26/08;G02B26/10;(IPC1-7):G01D5/30 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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