| 摘要 |
<p>The present invention provides an improved aluminum chloride trap having a disposable element, wherein the disposable element contains trapping media for condensing, solidifying and trapping condensable aluminum chloride vapor. The trap is designed such that the disposable element may be easily removed for rapid and safe disposal of condensed aluminum chloride solids and subsequently replaced with a new disposable element. The disposable element efficiently traps condensable aluminum chloride vapor from an aluminum etch system without the need for internal or external cooling means, such that condensable aluminum chloride vapor is prevented from condensing and depositing on the interior walls of the trap or on the interior walls of a vacuum conduit system used in an aluminum etch system. The improved aluminum chloride trap of this invention eliminates the hazardous conditions associated with removing condensed aluminum chloride solids from the interior surfaces of the trap and from the interior walls of a vacuum conduit system of an aluminum etch system.</p> |
