Projection lens e.g. for photolithography during semiconductor manufacture, has double aspherical lens spaced from image plane by more than maximum lens diameter

摘要

The projection lens has at least 5 different lens groups (G1-G5), each provided with a number of lens surfaces, at least 2 of the lens surfaces lying adjacent one another for providing a double aspherical lens (21), which is positioned at a minimum distance from the image plane (0') of greater than the maximum lens diameter.