Circuit for measuring capacitances of structures in an IC enables voltage-dependent, differential capacitance measurement - has test and reference structures connected to junctions of series transistors in parallel circuits connected between poles of controllable voltage supply

摘要

The circuit has a test structure (10) and a reference structure (20). Two series circuits (S1,S2) each contains two transistors (T1,T2;T3,T4) with their controlled paths in series and they are connected in parallel between connections (1,2,8) of a controllable voltage supply (9). A test structure connection is connected to the junction of the transistor sin the first series circuit. A connection for the reference structure is connected to the transistor junction in the second series circuit.