METHOD FOR CLEANING A PROCESS CHAMBER,申请号EP19990948246-传众专利搜索

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发明名称	METHOD FOR CLEANING A PROCESS CHAMBER
摘要
申请公布号	EP1118105(A1)	申请公布日期	2001.07.25
申请号	EP19990948246	申请日期	1999.09.22
申请人	APPLIED MATERIALS, INC.	发明人	VASUDEV, ANAND;ITOH, TOSHIO;SRINIVAS, RAMANUJAPURAM, A.;WU, FREDERICK;WU, LI;BOYLE, BRIAN;CHANG, MEI
分类号	B08B5/00;B08B7/00;C23C16/44;C23F1/12;C23F4/00;H01L21/00;H01L21/02;(IPC1-7):H01L21/00	主分类号	B08B5/00
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