| 发明名称 |
Suspended gas distribution manifold for plasma chamber |
| 摘要 |
<p>A gas inlet manifold (20, 32) for a plasma chamber (10) having a perforated gas distribution plate (20) suspended by flexible side walls (24). The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate. In another aspect, the suspension provides thermal isolation between the gas distribution plate and other components of the chamber. <IMAGE></p> |
| 申请公布号 |
EP1118693(A2) |
申请公布日期 |
2001.07.25 |
| 申请号 |
EP20010300380 |
申请日期 |
2001.01.17 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
WHITE, JOHN M.;KELLER, ERNST;BLONIGAN, WENDELL T. |
| 分类号 |
B01J19/08;C23C16/44;C23C16/455;C23C16/509;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):C23C16/455 |
主分类号 |
B01J19/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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