| 摘要 |
PURPOSE: A method and device for setting reference potential of semiconductor tester are provided to enable setting of a reference potential for each substrate without variations, even when the apparatus grows larger as a whole to cover a number of semiconductor devices to be measured. CONSTITUTION: In the application and the measurement of various signals for n=8 of semiconductor devices(DUT1-DUT8) to be measured using n=3 of substrates(10-30), the reference potentials of the semiconductor devices(DUT1-DUT3) are taken into the substrate(10), the reference potentials of the semiconductor devices(DUT4-DUT6) into the substrate(20) and the reference potentials of the semiconductor devices(DUT7,DUT8)into the substrate(30). The reference potentials, taken into the respective substrates(10-30), are averaged by addition and the resulting averaged potentials are further connected through the substrates, to produce a reference potential by the three substrates(10-30). The reference potential thus obtained is defined as reference potential of a level generation unit.
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