| 摘要 |
PROBLEM TO BE SOLVED: To provide a bellows composed of a stainless steel material for reactive gas which has high durability even if used under the atmosphere of extremely high reactivity and is reduced in cost and easily manufactured, and to provide a method of manufacturing for the bellows, and also to provide reactive gas treatment equipment. SOLUTION: The bellows can be manufactured by using a stainless steel material for reactive gas which has an oxide film composed essentially of Al oxide on the surface of a base material having a chemical composition consisting of, by weight, 12-30% Cr, 14-40% Ni, 2-6% Al, 0-0.01% of B+La+Ce, <=0.2% Mn, <=0.2% Si, <=0.003% S, <=0.05% N, <=0.01% O, <=0.03% C, <=0.03% P and the balance Fe with inevitable impurities.
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