| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem that all of ground and cut refuses generated by dicing or by machining such as CMP, or the like, are together mixed within a tank heretofore and a substance severe in environmental standards is also mixed to be treated along with these refuses and, therefore, the amount of waste becomes very much and it is impossible to recover the waste to reuse the same. SOLUTION: Wastewaters are classified by materials of matter to be removed or by impurities in the matter to be removed and highly concentrated in separate filter devices 53 to recover matters to be removed in wastewaters in separate recover devices 68.
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