| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holding device which is capable of downsizing the entire part of the substrate washing device by downsizing a treating vessel, is capable of achieving a lower cost and the less influencing on the environment by saving fluid for washing and is capable of maintaining wash with high cleanliness and facilitating maintenance. SOLUTION: Crank-like longitudinal supporting members 5a and 5b which are supported on one end side at a base body section 2 of the substrate holding device 1 and are disposed to extend parallel to each other are respectively composed of mounting sections 15c, indirect sections 15b which curve perpendicularly upward from the mounting sections 15c and horizontal sections 15a which curve perpendicularly in the direction parallel to the mounting sections 15c from the indirect sections 15b and parting therefrom. The axes of rotation of the mounting sections 15c are set near the central part in the height direction in the state that the substrate 23 is placed thereon.
|
