| 摘要 |
PROBLEM TO BE SOLVED: To provide a larger surface plate excellent in abrasion resistance and rust resistance at a relative low cost, in a surface plate to be used for a device for moving a substrate and positioning it. SOLUTION: A surface plate 20 is composed of a base material 21 made of metal and a ceramic layer 22 formed on the base material 21. It is desirable that the ceramic layer 22 has the thickness not less than 5μm and the Vickers hardness not less than 700 kg/mm2. It is desirable that a tolerance value of the flatness of the using surface of the ceramic layer 22 is not more than 46μm.
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