| 摘要 |
PROBLEM TO BE SOLVED: To efficiently form a very small groove with high accuracy by the electrolytic etching. SOLUTION: A resist layer 2 is formed on a surface 1A of a work 1 with the very small groove to be formed thereon, the patterning corresponding to the required very small groove is performed, an electrolyte 5 is interposed between the work 1 and a machining electrode 3, the pulse voltage is applied from a pulse voltage generator 6, and the work 1 is electrolytically etched using this resist layer 2.
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