发明名称 In-wafer testing of DFB semiconductor lasers
摘要 A method of manufacturing and testing a laser device that facilitates in-wafer testing of the laser device includes forming the laser device on a wafer and forming a light detecting device on the wafer adjacent to the laser device. The laser device should include a grating. The method further includes causing the laser device to lase while in the wafer and detecting light generated from the laser device with the light detecting device. Finally, the method includes obtaining an electro-optic parameter of the laser device from the detected light.
申请公布号 US6265237(B1) 申请公布日期 2001.07.24
申请号 US19990461947 申请日期 1999.12.15
申请人 LUCENT TECHNOLOGIES INC. 发明人 HEFFNER WILLIAM RUDOLPH;JOHNSON JOHN E.
分类号 H01L27/15;H01S5/00;H01S5/02;H01S5/026;H01S5/12;(IPC1-7):H01L21/00 主分类号 H01L27/15
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