| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a double-sided mirror finished substrate hardly warping by using a double-sided polishing machine for an entire sapphire polishing process unlike single-sided polishing of an adhesion system, and to reduce injuries on the surface of the substrate by adopting a polishing method using no diamond polishing. SOLUTION: Since a double-sided lapping machine and a double-sided polishing machine are used for an entire polishing process and a workpiece is processed while absorbing a warp produced by an internal stress change caused by reduction of the thickness of the workpiece, by processing it with its raw material made freely movable in a carrier, a finished product does not have a big warp. The workpiece is gradually brought close to a mirror finished surface by multi-stage polishing by using abrasive having different particle diameters. Thereby, a process producing little surface injury and using no expensive diamond abrasive material can be materialized. |
