发明名称 CERAMIC SUBSTRATE AND ALUMINUM NITRIDE SINTERED ARTICLE
摘要 PROBLEM TO BE SOLVED: To lower the deterioration of volume resistivity without deteriorating characteristics for raising or lowering temperature. SOLUTION: This ceramic substrate is characterized by comprising a nitride ceramic and containing boron in the nitride ceramic.
申请公布号 JP2001199769(A) 申请公布日期 2001.07.24
申请号 JP20000009256 申请日期 2000.01.18
申请人 IBIDEN CO LTD 发明人 NIWA TAKEO
分类号 H05B3/10;C04B35/58;C04B35/581;C04B41/51;C04B41/88;H01L21/00;H01L21/324;H01L21/683;H05B3/14;H05B3/26;H05B3/28;H05B3/68 主分类号 H05B3/10
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