发明名称 |
CERAMIC SUBSTRATE AND ALUMINUM NITRIDE SINTERED ARTICLE |
摘要 |
PROBLEM TO BE SOLVED: To lower the deterioration of volume resistivity without deteriorating characteristics for raising or lowering temperature. SOLUTION: This ceramic substrate is characterized by comprising a nitride ceramic and containing boron in the nitride ceramic. |
申请公布号 |
JP2001199769(A) |
申请公布日期 |
2001.07.24 |
申请号 |
JP20000009256 |
申请日期 |
2000.01.18 |
申请人 |
IBIDEN CO LTD |
发明人 |
NIWA TAKEO |
分类号 |
H05B3/10;C04B35/58;C04B35/581;C04B41/51;C04B41/88;H01L21/00;H01L21/324;H01L21/683;H05B3/14;H05B3/26;H05B3/28;H05B3/68 |
主分类号 |
H05B3/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|