发明名称 SPHERICAL ARTICLE CONVEYING DEVICE AND CONVEYING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a spherical article conveying device and a conveying method, capable of intermittently conveying in a non-contact state a spherical article to be conveyed together with reactive gas. SOLUTION: A second conveying device 20 injects specified gas so that it may be collected from a second injection port 40 provided on the inner surface of a hollow second conveying passage 23 toward the upstream side in the conveying direction.
申请公布号 JP2001199535(A) 申请公布日期 2001.07.24
申请号 JP20000004352 申请日期 2000.01.13
申请人 MITSUI HIGH TEC INC 发明人 AMANO KATSUMI
分类号 B65G51/02;B65G49/00;B65G49/07;H01L21/677;H01L21/68;(IPC1-7):B65G49/00 主分类号 B65G51/02
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