发明名称 DEVICE AND METHOD FOR GRINDING PLATE-SHAPED OBJECT
摘要 PROBLEM TO BE SOLVED: To reliably remove a distortion originally existing and a distortion produced during a grinding work, when grinding a plate-shaped object. SOLUTION: In this device for grinding a plate-shaped object, a supporting means 20 comprising a rotatable supporting table 21 to support the supporting surface of the plate-shaped object and a side supporting member 22 to support the side of the plate-shaped object are mounted, and the plate-shaped object can be supported by the side supporting member 22 without tightly fixing the plate-shaped object. In addition, in this method for grinding the plate-shaped object, the plate-shaped object is supported by the side supporting member 22 by using the plate-shaped object grinding device without tightly fixing the plate-shaped object, a grinding stone rotating while rotating the supporting table 21 is brought into contact with the surface of the plate-shaped object to be ground, and the plate-shaped object is ground so as to have a designated thickness.
申请公布号 JP2001198814(A) 申请公布日期 2001.07.24
申请号 JP20000009149 申请日期 2000.01.18
申请人 DISCO ABRASIVE SYST LTD 发明人 AOKI SHINICHI;HANAOKA KOJI
分类号 B24B7/04;B24B41/06;(IPC1-7):B24B41/06 主分类号 B24B7/04
代理机构 代理人
主权项
地址