发明名称 |
Method, apparatus and computer program product for identifying electrostatic discharge damage to a thin film device |
摘要 |
A method, apparatus and computer program product for identifying electrostatic discharge (ESD) damage to a thin film device. The method includes (1) determining a cold resistance of the thin film device, (2) determining a hot resistance of the thin film device, (3) calculating a heating delta resistance (HDR) from the hot and cold resistances and (4) comparing the HDR to a threshold value to ascertain if the thin film device has suffered ESD damage. The HDR of the thin film device is characterized by the following relationship: HDR=(hot resistance-cold resistance)/(cold resistance).
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申请公布号 |
US6265885(B1) |
申请公布日期 |
2001.07.24 |
申请号 |
US19990389138 |
申请日期 |
1999.09.02 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LUO JIH-SHIUAN;SMITH ROBERT LANGLAND;YEH CHIN-YU |
分类号 |
G01R31/26;G01R31/28;(IPC1-7):G01R31/26 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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