| 摘要 |
PROBLEM TO BE SOLVED: To provide the cleaning sheet of a substrate processor which is apt to be easily damaged by foreign matters, such as the manufacturing device and inspection device of a semiconductor, a flat panel display and a printed board, etc., for instance. SOLUTION: This cleaning sheet is composed by providing a supporting body with an adhesive material layer whose tensile elasticity (based on test method JISK 7127) is 0.98-4,900 N/mm2 as a cleaning layer or forming a normal adhesive layer on the other surface further.
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