发明名称 Single crystal processing by in-situ seed injection
摘要 A system and method for processing crystals is disclosed. The system includes a receiver tube for receiving semiconductor granules. The granules are then directed to a chamber defined within an enclosure. The chamber maintains a heated, inert atmosphere with which to melt the semiconductor granules into a molten mass. A nozzle, located at one end of the chamber, creates droplets from the molten mass, which then drop through a long drop tube. As the droplets move through the drop tube, they form spherical shaped semiconductor crystals. The drop tube is heated and the spherical shaped semiconductor crystals may be single crystals. An inductively coupled plasma torch positioned between the nozzle and the drop tube melts the droplets, but leaving a seed in-situ, or the droplets may be melted and a seed injected in-situ. The seed can thereby facilitate crystallization.
申请公布号 US6264742(B1) 申请公布日期 2001.07.24
申请号 US19990363420 申请日期 1999.07.29
申请人 BALL SEMICONDUCTOR INC. 发明人 VEKRIS EVANGELLOS;PATEL NAINESH J.;HANABE MURALI
分类号 C30B11/00;C30B29/06;C30B30/08;(IPC1-7):C30B9/00 主分类号 C30B11/00
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