摘要 |
The accelerometer is linear having a substantially planar plate-like proof mass (<HIL><PDAT>9</BOLD><PDAT>) mounted by four or more flexible mounting legs (<HIL><PDAT>8</BOLD><PDAT>) each co-planar with the proof mass (<HIL><PDAT>9</BOLD><PDAT>) to a substantially planar plate-like support (<HIL><PDAT>10</BOLD><PDAT>) fixedly mounted relative to the proof mass (<HIL><PDAT>9</BOLD><PDAT>) and co-planar therewith. In this way the proof mass (<HIL><PDAT>9</BOLD><PDAT>) is mounted for linear movement in a sensing direction in the plane containing the proof mass (<HIL><PDAT>9</BOLD><PDAT>), mounting legs (<HIL><PDAT>8</BOLD><PDAT>) and support (<HIL><PDAT>10</BOLD><PDAT>) to sense acceleration change applied to the accelerometer. At least two spaced apart substantially planar capacitor plates (<HIL><PDAT>11</BOLD><PDAT>) each co-planar with the proof mass, mounting legs and support, are provided for sensing linear movement of the proof mass (<HIL><PDAT>9</BOLD><PDAT>) in the sensing direction C. The proof mass (<HIL><PDAT>9</BOLD><PDAT>), mounting legs (<HIL><PDAT>8</BOLD><PDAT>), support (<HIL><PDAT>10</BOLD><PDAT>) and capacitor blades (<HIL><PDAT>11</BOLD><PDAT>) are formed from a single sheet of silicon and the mounting legs (<HIL><PDAT>8</BOLD><PDAT>) extend substantially perpendicularly to the sensing direction C. Restoring means are provided for returning the proof mass (<HIL><PDAT>9</BOLD><PDAT>) in the sensing direction C towards a null position.</PTEXT> |