发明名称 RECOVERY APPARATUS FOR ABRASIVE
摘要 <p>PROBLEM TO BE SOLVED: To store a membrane separator easily with an apparatus being prevented from being clogged due to membrane by means of valve switching alone, in stopping the operation of the apparatus, provide long stable operation for the membrane separator, and recover and reuse the abrasive with high efficiency stably for a long period. SOLUTION: This recovery apparatus, treating grinding process drainage with the membrane separator 2 and a centrifugal separator 3 for recovery of abrasive, is provided with a circulating means of circulating membrane permeated water in the membrane separator 2 while the operation of the apparatus is stopping.</p>
申请公布号 JP2001198825(A) 申请公布日期 2001.07.24
申请号 JP20000006759 申请日期 2000.01.14
申请人 KURITA WATER IND LTD 发明人 MATSUMOTO AKIRA;NOMURA MAKOTO
分类号 B24B57/02;C02F1/38;C02F1/44;H01L21/304;(IPC1-7):B24B57/02 主分类号 B24B57/02
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