RETICLE LOADER OF EXPOSURE EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: A reticle loader of exposure equipment for manufacturing a semiconductor device is provided to absorb a reticle within a case to easily feed the reticle outwardly. CONSTITUTION: The reticle loader(40) absorbs a reticle rested on pins of a reticle cassette by pumping air toward outside through a plurality of vacuum holes(42). A stopper(44) pushing the reticle is mounted on a top end of the reticle loader(40) and is formed of Teflon which can absorb external physical shock. Further, the stopper(44) comprises an internal ring housing a bearing, an external ring(54) and a fixing screw(56). The external ring(54) is contacted to the bearing of the internal ring to be rotated by the contact with the reticle. The fixing screw(56) passes through the external ring(54) to fix the internal ring and the external ring(54) against the top end of the reticle loader(40).