APPARATUS FOR PREVENTING CROSS-CONTAMINATION OF SMIF SYSTEM

摘要

PURPOSE: An apparatus for preventing cross-contamination of an SMIF(Standard Mechanical Interface) system is provided to prevent cross-transfer contamination of a pollution source by arranging a chamber on a loader and separately providing a pod purge line a chamber purge line. CONSTITUTION: A loader(100) loads and unloads a wafer to a process room. A pod(110) is formed on an upper part of the loader(100). A pod purge hole(120) is arranged to purge an inside space of the pod(110). A chamber(200) is arranged on an inside of the loader(100). The chamber(200) contains a wafer cassette(300) and is separated from the inside space of the pod(110). A chamber purge hole(400) is arranged to purge an inside of the chamber(200). The purging process is carried out in a state that the wafer and the pod(110) are separated from each other, so that a pollution source is prevented from being cross-transferred between the pod(110) and the wafer. Accordingly, defective proportion of semiconductor devices becomes decreased and thereby productivity is increased.