| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric actuator which can stabilize a rotation with a simple structure. SOLUTION: A discoidal rotating and moving body 1, a load cell 2 which applies a preload to the rotating and moving body 1, a rotating body 3, a board 4 in which an interconnection is printed on the surface and a spacer 5 which keeps an interval from the board 4 constitute a micropiezoelectric motor 100. Three bent displacement mechanism parts 33 in which piezoelectric elements used to generate an expansion and contraction motion are pasted and bonded to supports 32 are installed at the vibrating body 3. A center part 21 to which a shaft protrusion part 35 is attached, three suspension arms 22 and a rim 23 which comes into contact with the rotating and moving body constitute the load cell 2. |
