DIFFUSER FOR MANUFACTURING SEMICONDUCTOR

摘要

PURPOSE: A diffuser for manufacturing a semiconductor is provided to be capable of shortening work period and enhancing productivity as well as remarkably reducing fabrication costs and being simplified in its structure by positioning a susceptor for loading/unloading a wafer in a process position to perform a diffusion process without lifting the susceptor. CONSTITUTION: Wafer is loaded and unloaded to/from a susceptor(32) positioned within a chamber(30). A door(34) opened/closed for loading/unloading the wafer(W) on the susceptor(32) are equipped on one side of the chamber(30). The susceptor(32) is positioned in a process position within the chamber(30), and the door(34) is positioned in a position corresponding to the susceptor(32).