发明名称 |
Improving optical separation of needle-like phosphor layers formed on substrate comprises controlling vaporization so that phosphor layer is deposited on substrate in reduced thickness |
摘要 |
Improving the optical separation of needle-like phosphor layers formed on a substrate by vaporizing comprises controlling the vaporization in such a way that the phosphor layer is deposited on the substrate in a thickness which is less than thickness of the phosphor material present as the solid body. Preferred Features: The thickness is reduced by 5-50%. A cooled vapor stream is led onto the substrate to vaporize the phosphor layer. The stream is cooled using a cooled inert gas. The pressure of the inert gas is 1-3 Pa.
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申请公布号 |
FR2803854(A1) |
申请公布日期 |
2001.07.20 |
申请号 |
FR20010000028 |
申请日期 |
2001.01.03 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
FUCHS MANFRED;MATTERN DETLEF;HELL ERICH;SCHMITT BERNHARD |
分类号 |
C23C14/06;H01J9/22;(IPC1-7):C23C14/24;C30B29/62 |
主分类号 |
C23C14/06 |
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