发明名称 Improving optical separation of needle-like phosphor layers formed on substrate comprises controlling vaporization so that phosphor layer is deposited on substrate in reduced thickness
摘要 Improving the optical separation of needle-like phosphor layers formed on a substrate by vaporizing comprises controlling the vaporization in such a way that the phosphor layer is deposited on the substrate in a thickness which is less than thickness of the phosphor material present as the solid body. Preferred Features: The thickness is reduced by 5-50%. A cooled vapor stream is led onto the substrate to vaporize the phosphor layer. The stream is cooled using a cooled inert gas. The pressure of the inert gas is 1-3 Pa.
申请公布号 FR2803854(A1) 申请公布日期 2001.07.20
申请号 FR20010000028 申请日期 2001.01.03
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 FUCHS MANFRED;MATTERN DETLEF;HELL ERICH;SCHMITT BERNHARD
分类号 C23C14/06;H01J9/22;(IPC1-7):C23C14/24;C30B29/62 主分类号 C23C14/06
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