发明名称 Process for filling apertures in a circuit board or chip carrier
摘要 Apertures in a circuit board or chip carrier are filled with a cured photosensitive dielectric material by substantially filling the apertures in the circuit board or chip carrier and applying a layer of a thickness to the circuit board or chip carrier with a positive photosensitive dielectric material, exposing the photosensitive dielectric material to actinic radiation in such a way as to leave material located in apertures unexposed to the radiation; baking the structure so as to harden the unexposed photosensitive dielectric material and developing the exposed dielectric material in order to remove it leaving behind cured photosensitive dielectric material in the apertures.
申请公布号 US2001008747(A1) 申请公布日期 2001.07.19
申请号 US20010788612 申请日期 2001.02.21
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 APPELT BERND KARL;JOHANSSON GARY ALAN;PAPATHOMAS KONSTANTINOS I.
分类号 G03F7/00;H01L21/48;H05K3/00;(IPC1-7):G03F7/40;B05D5/12;H01L21/31;H01L21/47 主分类号 G03F7/00
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