PHOTOELECTRIC EMISSION SURFACE AND PHOTODETECTOR UTILIZING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a photoelectric emission surface and a photodetector utilizing the same, which comprises a Si substrate having PS area and is of a low noise for practical use. SOLUTION: This photodetector 100 comprises a photoelectron emission surface having a p-type Si substrate 11, a porous silicon area 12 formed on the p-type Si substrate, an Au electrode 13 formed on the porous silicon area 12, and an ohmic electrode 14 formed on the p-type Si substrate opposite to the porous silicon area 12 formed on the p-type Si substrate; and an anode 15. The photoelectron emission surface and the photodetector can be constituted by the p-type Si substrate having the porous silicon area of new material and structure. Further, by the p-type Si substrate, a low noise of photoelectron emission surface can be obtained since cold electron emission is not generated.