ANGULAR VELOCITY SENSOR, ACCELERATION SENSOR AND METHOD OF MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To eliminate the need for a step etching process and the influence of driving voltage. SOLUTION: This angular velocity sensor includes: a frame 106; a vibrating frame 104 disposed within the frame 106 and vibrated by a predetermined driving force; a weight part 101 disposed within the vibrating frame 104 for detecting angular velocity displaced in the direction of the Coriolis force, by Coriolis force perpendicular to the direction of the vibration, a composite beam 102 connecting the vibrating frame 104 and the weight part 101; and a vibrating beam 105 connecting the frame 106 to the vibrating frame 104.