| 摘要 |
PROBLEM TO BE SOLVED: To enhance the sensitivity of a resonant element. SOLUTION: Vibration side vibration-adjusting electrodes 30 and 31 are formed through an insulating layer 32 in right and left end edge areas, respectively, on the back 5c of a vibrator 5 in the direction of an XZ two-dimensional plane, with a gap therebetween along X direction. Conductive layers 20 and 21 are oppositely disposed on a board 2 while being spaced from the vibration side vibration-adjusting electrodes 30 and 31 along Y direction. The widths of the conductive layers 20 and 21 in the X direction are such that when the vibrator 5 vibrates in the X direction, the vibration side vibration-adjusting electrodes 30 and 31 do not project from the opposite areas of the conductive layers 20 and 21. With the vibrator 5 and the conductive layers 20 and 21 held at approximately the same potential, voltages for imparting electrostatic attracting forces are applied to the vibration side vibration-adjusting electrodes 30 and 31 to adjust the resonant frequency of the vibrator 5 and also to correct the inclination of the vibrator 5 relative to the substrate surface of the board 2. The vibrator 5 vibrates ideally in X direction along the substrate surface to enhance the sensitivity of the resonant element 1. |
